Two Methods of Argon Purification

For gases, purity is a measure of whether the gas is of high quality. Since argon is inert gas, it can be used as a protective gas for manufacturing single crystals and polycrystals. In order to improve the quality of silicon crystals, it is essential to select high-purity argon, which can not only improve the service life of crystals, but also meet the needs of the market.

In general, the argon purification process is achieved through purification devices, and the argon purification methods can be divided into direct deoxygenation and getter purification.

Direct deoxidation method: the use of active metal / catalyst and oxygen in argon to react, digest the oxygen in argon, so as to achieve the purpose of deoxidation, through molecular sieve adsorption of water molecules in argon, so that the water content of argon is less than 1ppm.

Getter purification method: the use of getter purification agent or desiccant, getter can form a stable compound with trace impurities in argon, so as to achieve the effect of argon refining, after the use of getter purification method, the purity can be as high as 6 9 high purity argon.

The above two is a simple introduction to the argon purification method, in contrast, the getter purification method equipment investment is large but the purity is high, this method has been widely used in industry.